High precision surface structuring with ultra-short laser pulses and synchronized mechanical axes

For surface and 3D structuring in a 2.5D process, ultra-short pulsed laser systems are mostly used in combination with mechanical axes, whereas the mechanical axes can include electrical motor as well as beam deflecting systems like a galvo scanner. The motion of the axes is synchronized with the clock of the laser pulses, by a modification of the electronic axes control. This work shows the scalability of the ablation process up to MHz-regime in relation to surface quality and ablation efficiency, drilling of thin foils without any heat accumulation and deforming problems of the foil. Furthermore the transfer of the machining strategy from a synchronized galvo scanner to a rotating cylinder setup is shown. (C) 2013 The Authors. Published by Elsevier B.V. Selection and/or peer-review under responsibility of the German Scientific Laser Society (WLT e.V.)