Physical characterization and electrical properties of chelating-agents added PZT films

被引：9

作者：

Mo, TC ^{[1
]}

Chen, SY ^{[1
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan

来源：

FERROELECTRICS | 2001年 / 259卷 / 1-4期

关键词：

PZT; sol-gel; chelating agents; perovskite; remanent polarization;

D O I：

10.1080/00150190108008752

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, the chelating agents including ethylene glycol, formamide, glycerol and acetylacetone were used to investigate their effect on perovskite formation, microstructure evolution and electrical properties of PZT films. Two different kind of heating profiles were used for comparison. With fast heating rate, PZT films added with either ethylene glycol or acetylacetone form a dense larger-grained microstructure and show a maximum Pr of similar to31 muC/cm(2). On the other hand, in the heating schedule with a heating rate of 10 degreesC/min, Pr reduction was observed except the glycerol-added PZT films because the addition of glycerol can much reduce the formation temperature of perovskite phase.

引用

页码：305 / 310

页数：6

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