Transparent conductive Sb-doped SnO2/Ag multilayer films fabricated by magnetron sputtering for flexible electronics

被引：97
作者：
Yu, Shihui [1 ]
Zhang, Weifeng [2 ,3 ]
Li, Linngxia [1 ]
Xu, Dan [1 ]
Dong, Helei [1 ]
Jin, Yuxin [1 ]
机构：
[1] Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China
[2] Henan Univ, Key Lab Photovolta Mat Henan Prov, Kaifeng 475004, Peoples R China
[3] Henan Univ, Sch Phys & Elect, Kaifeng 475004, Peoples R China
来源：
ACTA MATERIALIA | 2013年 / 61卷 / 14期
基金：
中国博士后科学基金;
关键词：
Semiconductors; Multi layer thin films; Electrical properties; Growth temperature; Mechanism; INDIUM TIN OXIDE; THIN-FILMS; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES; TEMPERATURE; DC; SUBSTRATE;
D O I：
10.1016/j.actamat.2013.05.031
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The effects of an embedded silver layer and substrate temperature on the electrical and optical properties of Sb-doped SnO2 (ATO)/silver (Ag) layered composite structures on polyethylene naphthalate substrates have been investigated. The highest conductivity of ATO/Ag multilayer films was obtained with a carrier concentration of 1.5 x 10(22) cm(-3) and a resistivity of 2.4 x 10(-5) Omega cm at the optimum Ag layer thickness and substrate temperature. The photopic averaged transmittance and Haacke figure of merit are 81.7%, and 21.7 x 10(-3) Omega(-1), respectively. In addition, a conduction mechanism is proposed to elucidate the mobility variation with increased Ag thickness. We also describe the influence of substrate temperature on the structural, electrical and optical properties of the ATO/Ag multilayer films, and propose a mechanism for the changes in electrical and optical properties at different substrate temperatures. (C) 2013 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：5429 / 5436
页数：8
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