Pulsed laser deposition with excimer lasers

被引：5
|
作者：
Delmdahl, R. [1 ]
Paetzel, R. [1 ]
机构：
[1] Coherent GmbH, D-37079 Gottingen, Germany
来源：
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 10 | 2008年 / 5卷 / 10期
关键词：
D O I：
10.1002/pssc.200779515
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Progress in material research and processing industry is fueled by the technique of pulsed laser deposition (PLD). High energy excimer lasers enable this technique since every material is amenable to their high photon energies. Spectral properties, temporal pulse and laser beam parameters of state of the art excimer lasers will be compared with frequency converted Nd:YAG lasers. Both quality and longevity of the deposited layers strongly depend on the degree of accuracy achieved in the thin film ablation and subsequent deposition process. [GRAPHICS] (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：3276 / 3279
页数：4
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