Investigation of the effect of annealing temperature on optical properties of lanthanum-oxide thin films prepared by sol-gel method

被引：17

作者：

Gao, Gang ^{[1
]}

Yang, Lei ^{[3
]}

Dai, Bing ^{[1
]}

Xia, Fei ^{[1
]}

Yang, Zhenhuai ^{[1
]}

Guo, Shuai ^{[1
]}

Wang, Peng ^{[1
]}

Geng, Fangjuan ^{[1
]}

Han, Jiecai ^{[1
]}

Zhu, Jiaqi ^{[1
,2
]}

机构：

[1] Harbin Inst Technol, Ctr Composite Mat & Struct, 2 Yikuang St, Harbin 150001, Heilongjiang, Peoples R China

[2] Minist Educ, Key Lab Microsyst & Microstruct Mfg, Beijing, Peoples R China

[3] Harbin Inst Technol, Ctr Anal Measurement, Harbin 150001, Heilongjiang, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2019年 / 365卷

基金：

中国国家自然科学基金; 对外科技合作项目（国际科技项目）;

关键词：

La2O3; films; Optical properties; Annealing temperature; RARE-EARTH-OXIDES; GATE INSULATOR; LA2O3; DEPOSITION; DIELECTRICS; MORPHOLOGY; DESIGN; LAYER; XPS;

D O I：

10.1016/j.surfcoat.2018.07.001

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

As lanthanum oxide (La2O3) has a large bandgap, it exhibits excellent optical properties. In this work, La2O3 thin films are prepared by the sol-gel method from a lanthanum chloride (LaCl3) precursor, on quartz and sapphire (0001) substrates. The effect of the annealing temperature (400-800 degrees C) on the optical properties of the La2O3 films is investigated. The structure and optical properties are analyzed by X-ray diffraction, atomic force microscopy, scanning electronic microscopy, X-ray photoemission spectroscopy, Raman spectroscopy, ultraviolet (UV)-visible spectroscopy, Fourier transform infrared spectroscopy, and infrared variable angle spectroscopic ellipsometry. Results indicate that with an annealing temperature of similar to 600 degrees C, the roughness and optical properties of La2O3 films can be significantly improved.

引用

页码：164 / 172

页数：9

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