Design on the Driving Mode of MEMS Vibratory Gyroscope

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy and stability of the system. In the frequency locking circuit, two ways of PLL (Phase Locked Loop) and self-oscillation are used to improve the reliability of the system. Different levels of simulation and circuit implementation are made using the working mode and parameter of the dual-tuner output-quality pieces of silicon MEMS gyroscope which is designed by Our own laboratory.