Laser-induced subwavelength structures by microdroplet superlens

Nanoscale patterns on rigid or flexible substrates are of considerable interest in modern nanophotonics and optoelectronics devices. Subwavelength structures are produced in this study by using a laser beam and microdroplets that carry nanoparticles to the deposition substrate. These droplets are generated from an aqueous suspension of nanoparticles by electrospray and dispensed through a conical hollow laser beam so that laser-droplet interactions occur immediately above the substrate surface. Each microdroplet serves the dual role as a nanoparticle carrier to the substrate and as a superlens for focusing the laser beam to a subwavelength diameter. This focused beam vaporizes the droplet and sinters the nanoparticles on the substrate. The deposition of subwavelength nanostructures and thin films on a silicon wafer are demonstrated in this paper. This process may be applied to produce novel nanophotonics and electronics devices involving a variety of subwavelength patterns including an ordered array of semiconductor nanoparticles. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement