The study of ESD induced defects in smart power ESD protection circuits using low frequency noise measurements

被引：1

作者：

Hadzi-Vukovic, J. ^{[1
]}

Jevtic, M. ^{[2
]}

Glavanovics, M. ^{[3
]}

Rothleitner, H. ^{[1
]}

机构：

[1] Infineon, A-9500 Villach, Austria

[2] Inst Phys, Belgrade 10080, Serbia

[3] Kompetenzzentrum Automobil & Ind Elek, A-9524 Villach, Austria

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2008年 / 205卷 / 11期

关键词：

D O I：

10.1002/pssa.200780115

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

To investigate the reliability of ESD protection in smart power integrated circuits the ESD experiments are performed and degradation is analyzed by low frequency noise measurements. Combining the noise results with further failure analysis analytical methods we have examined a location and the nature of defects. Special attention was dedicated to analysis of latent defects. The possibility to apply noise as reliability indicator for repetitive testing and for use in high volume production are also discussed. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：2544 / 2547

页数：4

共 6 条

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