Synthesis of WO3 nanorod based thin films for ethanol and H2 sensing

被引：21
|
作者：
Ahmad, M. Z. [1 ,4 ]
Kang, J. H. [2 ]
Sadek, A. Z. [1 ,3 ]
Moafi, A. [3 ]
Sberveglieri, G. [5 ]
Wlodarski, W. [1 ]
机构：
[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia
[2] Univ Incheon, Dept Phys, Incheon 406772, South Korea
[3] RMIT Univ, Sch Appl Sci, Melbourne, Australia
[4] Mechanisat Automat Res Ctr, MARDI HQ, Serdang 43400, Selangor, Malaysia
[5] Univ Brescia, SENSOR IDASC CNR, I-25133 Brescia, Italy
来源：
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 | 2012年 / 47卷
关键词：
WO3; nanorods; pulsed laser deposition; ARF excimer laser; ethanol sensing; hydrogen sensing; DEPOSITION; VAPOR;
D O I：
10.1016/j.proeng.2012.09.157
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
WO3 nanorod based thin films were deposited via pulsed laser deposition onto conductometric transducers employing the shortest wavelength (193 nm) ArF excimer laser. Micro-characterization techniques such as SEM and XRD were employed to study surface morphology and crystal structure. It was observed that the fabricated films showed nanocolumnar features perpendicular to the surface. Gas sensing characterizations of the developed sensors were tested towards hydrogen and ethanol at temperature between room and 400 degrees C. The sensor exhibited high response towards H-2 and ethanol at operating temperatures of 170 and 400 degrees C, respectively. (C) 2012 Elsevier Ltd.... Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.
引用
收藏
页码：358 / 361
页数：4
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