Effects of SiO2 interlayer on electrical properties of Al-doped ZnO films under bending stress

被引：12
作者：
Lim, Young Soo [1 ]
Seo, Seul Gi [1 ,2 ]
Kim, Bo Bae [1 ,2 ]
Choi, Hyoung-Seuk [1 ]
Seo, Won-Seon [1 ]
Cho, Yong Soo [2 ]
Park, Hyung-Ho [2 ]
机构：
[1] Korea Inst Ceram Engn & Technol, Green Ceram Div, Seoul 153801, South Korea
[2] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
来源：
ELECTRONIC MATERIALS LETTERS | 2012年 / 8卷 / 04期
关键词：
transparent conducting oxide; ZnO; sputtering; flexible; ZINC-OXIDE FILMS; POLYETHYLENE TEREPHTHALATE; THIN-FILMS; OPTICAL-PROPERTIES; TRANSPARENT; SUBSTRATE;
D O I：
10.1007/s13391-012-2006-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report the effects of an SiO2 interlayer on the structural and electrical properties of Al-doped ZnO (AZO) films grown on polyimide (PI) substrate. By inserting a SiO2 interlayer between the AZO film and the PI substrate, we could control the microstructure of the AZO films. The granule size of the SiO2 interlayer was determined strate temperature, and the column width in the AZO film was strongly affected by the initial granule size in the interlayer. In-situ Hall measurement of the AZO films under bending stress was performed for the first time, and flexibility-related electrical properties of the AZO films were discussed.
引用
收藏
页码：375 / 379
页数：5
相关论文
共 50 条
[31]   Effect of Substrate Temperature on the Electrical Properties of Al-doped Zinc Oxide Films Deposited on Polyethylene Terephthalate [J].
Faraj, Mohammad G. .
ARO-THE SCIENTIFIC JOURNAL OF KOYA UNIVERSITY, 2022, 10 (02) :131-133
[32]   Tailoring of optical and electrical properties of transparent and conductive Al-doped ZnO films by adjustment of Al concentration [J].
Zhang, Wu ;
Gan, Jie ;
Li, Lequn ;
Hu, Zhigao ;
Shi, Liqun ;
Xu, Ning ;
Sun, Jian ;
Wu, Jiada .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2018, 74 :147-153
[33]   Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films [J].
Lee, Do-Joong ;
Kim, Hyun-Mi ;
Kwon, Jang-Yeon ;
Choi, Hyoji ;
Kim, Soo-Hyun ;
Kim, Ki-Bum .
ADVANCED FUNCTIONAL MATERIALS, 2011, 21 (03) :448-455
[34]   Influence of substrate temperature on the structural, electrical and optical properties of Al-doped ZnO films by RF magnetron sputtering [J].
Sun, Yihua ;
Li, Chenhui ;
Xiong, Weihao ;
Huang, Caihua .
APPLICATIONS OF ENGINEERING MATERIALS, PTS 1-4, 2011, 287-290 :2308-+
[35]   Effects of Deposition Inclination Angle on the Mechanical, Optical and Electrical Characteristics of Al-doped ZnO Films [J].
Li, Tse-Chang ;
Lin, Jen-Fin .
2015 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2015, :151-154
[36]   Effects of secondary magnetic field on the properties of Al-doped ZnO films prepared by RF magnetron sputtering [J].
Chen, Ming ;
Zhou, Xiying ;
Shao, Jiajia ;
Mao, Xiujuan ;
Yang, Guoliang .
CERAMICS INTERNATIONAL, 2014, 40 (09) :14347-14353
[37]   Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering [J].
Kim, Y. H. ;
Lee, K. S. ;
Lee, T. S. ;
Cheong, B. ;
Seong, T. -Y. ;
Kim, W. M. .
APPLIED SURFACE SCIENCE, 2009, 255 (16) :7251-7256
[38]   Physical Properties of Al-doped ZnO and Ga-doped ZnO Thin Films Prepared by Direct Current Sputtering at Room Temperature [J].
Ke, Zhu ;
Ye, Yang ;
Jia, Li ;
Weijie, Song .
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION, 2017, 32 (01) :85-88
[39]   Effects of deposition temperatures and annealing conditions on the microstructural, electrical and optical properties of polycrystalline Al-doped ZnO thin films [J].
Oh, Joon-Ho ;
Kim, Kyoung-Kook ;
Seong, Tae-Yeon .
APPLIED SURFACE SCIENCE, 2011, 257 (07) :2731-2736
[40]   Effects of Al Diffusion Process on the Electrical, Optical, and Structural Properties of Transparent Conducting Al-doped ZnO [J].
Bhaskar Parida ;
Seonghoon Jeong ;
Hyunsoo Kim .
Journal of the Korean Physical Society, 2018, 73 :917-921
12345