In situ diagnostic methods for thin-film fabrication: utilization of heat radiation and light scattering

被引：50
作者：
Sakurai, K
Hunger, R
Scheer, R
Kaufmann, CA
Yamada, A
Baba, T
Kimura, Y
Matsubara, K
Fons, P
Nakanishi, H
Niki, S
机构：
[1] Sci Univ Tokyo, Noda, Chiba 2788510, Japan
[2] HMI, Div Solar Energy, D-14109 Berlin, Germany
[3] Tech Univ Darmstadt, D-12489 Berlin, Germany
[4] AIST, EEI, Tsukuba, Ibaraki 3058568, Japan
来源：
PROGRESS IN PHOTOVOLTAICS | 2004年 / 12卷 / 2-3期
关键词：
solar cells; CIGS; pyrometer; spectroscopic light scattering; SLS; thickness; roughness; Se overpressure;
D O I：
10.1002/pip.519
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
Deposition processes of Cu(In, Ga)Se-2 (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film proper-ties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ. Copyright (C) 2004 John Wiley Sons, Ltd.
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收藏
页码：219 / 234
页数：16
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