Structure and Mechanical Properties of Nanolayered Ti-B/C Films

被引：0

作者：

Ivashchenko, V. I. ^{[1
]}

Onoprienko, A. A. ^{[1
]}

Skrynskyy, P. L. ^{[1
]}

Sinelnichenko, A. K. ^{[1
]}

Kovalchenko, A. M. ^{[1
]}

Olifan, E. I. ^{[1
]}

Marchuk, O. K. ^{[1
]}

机构：

[1] Natl Acad Sci Ukraine, Frantsevich Inst Problems Mat Sci, UA-03142 Kiev, Ukraine

来源：

JOURNAL OF SUPERHARD MATERIALS | 2022年 / 44卷 / 06期

关键词：

nanolayered films; structure; hardness; friction; B-C COATINGS; TRIBOLOGICAL PROPERTIES; NANOCOMPOSITE FILMS; MAGNETRON; MICROSTRUCTURE; HARD; STRESS; DEPOSITION; STABILITY; GROWTH;

D O I：

10.3103/S1063457622060053

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanolayered Ti-B/C films are deposited by sequential DC magnetron sputtering of TiB2 and graphite targets. The Si(100) platelets preliminarily heated to 400 degrees C are used as substrates to which negative bias voltage of 50 V is applied. The operating parameters remain unchanged for the TiB2 target, whereas the sputtering current is varied within 50-200 mA for the graphite target. The structure, chemical bonding, Knoop hardness, and friction coefficient as functions of the sputtering current (I-s) at the graphite target are studied by the methods of XRD, XPS, indentation, and tribological testing. The crystalline phase is detected in the films structure, which differs from that for TiB2. The film deposited at CYRILLIC CAPITAL LETTER BYELORUSSIAN-UKRAINIAN I-s = 150 mA exhibits the maximum hardness, and the film deposited at CYRILLIC CAPITAL LETTER BYELORUSSIAN-UKRAINIAN I-s = 200 mA has the minimum friction coefficient.

引用

页码：405 / 412

页数：8

共 31 条

[1] Stress, interfacial effects and mechanical properties of nanoscale multilayered coatings [J].

Abadias, G. ;

Michel, A. ;

Tromas, C. ;

Jaouen, C. ;

Dub, S. N. .

SURFACE & COATINGS TECHNOLOGY, 2007, 202 (4-7) :844-853

[2] Microstructure and mechanical properties of multilayer TiB2/C and co-sputtered TiB2-C coatings for cutting tools [J].

Baker, MA ;

Gilmore, R ;

Lenardi, C ;

Gibson, PN ;

Gissler, W .

VACUUM, 1999, 53 (1-2) :113-116

[3] Hardness and stability of metal-nitride nanoscale multilayers [J].

Barnett, SA ;

Madan, A .

SCRIPTA MATERIALIA, 2004, 50 (06) :739-744

[4] Low stress TiB2 coatings with improved tribological properties [J].

Berger, M ;

Karlsson, L ;

Larsson, M ;

Hogmark, S .

THIN SOLID FILMS, 2001, 401 (1-2) :179-186

[5] REACTIVELY SPUTTERED TITANIUM BORIDE THIN-FILMS [J].

BLOM, HO ;

LARSSON, T ;

BERG, S ;

OSTLING, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02) :162-165

[6] Microstructure, mechanical and tribological properties of TiBC coatings by DC magnetron sputtering onto AISI M2 steel using independent TiB2 and graphite targets [J].

Contreras, E. ;

Galindez, Y. ;

Gomez, M. A. .

SURFACE & COATINGS TECHNOLOGY, 2018, 350 :298-306

[7] EXPERIMENTAL-STUDY OF THE TI-B-C SYSTEM USING LPCVD [J].

GUIBAN, MA ;

MALE, G .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1995, 15 (06) :537-549

[8] GROWTH OF SINGLE-CRYSTAL TIN VN STRAINED-LAYER SUPERLATTICES WITH EXTREMELY HIGH MECHANICAL HARDNESS [J].

HELMERSSON, U ;

TODOROVA, S ;

BARNETT, SA ;

SUNDGREN, JE ;

MARKERT, LC ;

GREENE, JE .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (02) :481-484

[9]

Holleck H, 1995, SURF COAT TECH, V76, P328, DOI 10.1016/0257-8972(95)02555-3

[10] Recent progress in large scale manufacturing of multilayer/superlattice hard coatings [J].

Hovsepian, PE ;

Lewis, DB ;

Münz, WD .

SURFACE & COATINGS TECHNOLOGY, 2000, 133 :166-175

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