Micro-thermal actuator sensor without batteries for microelectronics applications of ultra-low power consumption

被引：0

作者：

Varona, J. ^{[1
]}

Tecpoyotl-Torres, M. ^{[2
]}

Velazquez, R. ^{[1
]}

机构：

[1] Univ Panamericana Bonaterra, Escuela Ingn, Aguascalientes 20290, Mexico

[2] UAEM, Ctr Invest Ingn & Ciencias Aplicadas, Cuernavaca 62209, Morelos, Mexico

来源：

REVISTA MEXICANA DE FISICA | 2013年 / 59卷 / 01期

关键词：

CMOS TECHNOLOGY; BEAM;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：26 / 38

页数：13

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