Beam conditioning multilayer optics for laboratory X-ray sources

被引:0
|
作者
Platonov, Yuriy [1 ]
Verman, Boris [1 ]
Jiang, Licai [1 ]
Kim, Bonglea [1 ]
机构
[1] Rigaku Innovat Technol, Auburn Hills, MI 48326 USA
来源
ADVANCES IN LABORATORY-BASED X-RAY SOURCES, OPTICS, AND APPLICATIONS IV | 2015年 / 9590卷
关键词
X-ray multilayer optics; multilayer structure; magnetron sputtering deposition; X-ray optical system; X-ray focusing and collimating;
D O I
10.1117/12.2196352
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Practically, all modern x-ray diffractometers, SAXS, TXRF systems and many other laboratory X-ray instruments are equipped with multilayer X-ray optics. It is due to a much higher flux these instruments have comparing with those having no optics or having a grazing incidence optics without multilayer coatings. There are variety of the multilayer optics designs -from one bounce collimating parabolic mirror to four corners double bounce focusing mirrors. Design of multilayer optics depends on application, X-ray source parameters, requirements on divergence, focal spot, available room for the optics, manufacturing capability and cost. Key characteristics of the optics, requirements on multilayers d-spacing accuracy, optics slope errors, and substrates surface roughness are discussed in the paper. Different optics designs are considered including recently developed optics for a laboratory topography system and a Hybrid optics combining multilayer and crystal optics for XRR and XRD.
引用
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页数:10
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