Fabrication of High-Quality VO2 Thin Films by Ion-Assisted Dual ac Magnetron Sputtering

被引：58

作者：

Ba, Cheilchou ^{[1
]}

Bah, Souleymane T. ^{[1
]}

D'Auteuil, Marc ^{[1
]}

Ashrit, P. V. ^{[2
]}

Vallee, Real ^{[1
]}

机构：

[1] Univ Laval, COPL, Quebec City, PQ G1V 0A6, Canada

[2] Univ Moncton, Thin Films & Photon Res Grp GCMP, Dept Phys & Astron, Moncton, NB E1A 3E9, Canada

来源：

ACS APPLIED MATERIALS & INTERFACES | 2013年 / 5卷 / 23期

基金：

加拿大自然科学与工程研究理事会;

关键词：

thermochromics; vanadium oxide; ac cathodic sputtering; microstructure; transition temperature; optical switching; PHASE-TRANSITION; METAL; XPS;

D O I：

10.1021/am403807u

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The technique of cathodic ac dual magnetron sputtering along with the high energy ionic bombardment is known to yield high-quality thin films in terms of their uniformity and high density. This technique has been applied for the first time to achieve thermochromic VO2 thin films that show a high optical and electrical contrast between normal and switched states. In this two-step process Vanadium metal films were deposited and subsequently oxidized in optimum conditions to achieve stoichiometric VO2 films. Typical films switched between more than 40 % to less than 5 % transmission in the infrared region while undergoing an electrical sheet resistance change between 1 x 10(5) and 1 x 10(2) Omega/cm(2). The application potential of such VO2 films in integrated optics is deemed high.

引用

页码：12520 / 12525

页数：6

共 24 条

[1] THERMOCHROMIC VO2 FILMS FOR ENERGY-EFFICIENT WINDOWS [J].