Ion-induced formation of regular nanostructures on amorphous GaSb surfaces

被引：86

作者：

Facsko, S

Bobek, T

Kurz, H

Dekorsy, T

Kyrsta, S

Cremer, R

机构：

[1] Rhein Westfal TH Aachen, Lehrstuhl Halbleitertech, D-52056 Aachen, Germany

[2] Rhein Westfal TH Aachen, Inst Halbleitertech, D-52056 Aachen, Germany

[3] Forschungszentrum Rossendorf EV, Inst Ionenstrahlphys & Mat Forsch, D-01314 Dresden, Germany

[4] Rhein Westfal TH Aachen, Inst Theoret Huttenkunde, D-52056 Aachen, Germany

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 01期

关键词：

D O I：

10.1063/1.1429750

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Crystalline and amorphous GaSb surfaces are compared concerning their response to sputter erosion with low energy Ar+ ions under normal incidence. We show that the formation of regular nanostructures on GaSb is basically independent of whether the initial material is crystalline or amorphous. The similarity in the temporal and spatial evolution demonstrates that the dynamics of the morphology evolution is entirely controlled by a thin amorphous surface layer. (C) 2002 American Institute of Physics.

引用

页码：130 / 132

页数：3

共 50 条

[41] THERMALLY AND ION-INDUCED PHASE FORMATION IN A PD/GE BILAYER
LI, J
HONG, QZ
MAYER, JW
JOURNAL OF APPLIED PHYSICS, 1989, 66 (08) : 3600 - 3603
[42] Ion-induced electron emission from surfaces: Dynamical screening effects
Kouzakov, KA
Berakdar, J
PHYSICAL REVIEW A, 2003, 68 (02):
[43] Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment
Keller, Adrian
Facsko, Stefan
MATERIALS, 2010, 3 (10) : 4811 - 4841
[44] Electron emission from surfaces mediated by ion-induced plasmon excitation
Baragiola, Raul A.
Carmina Monreal, R.
SLOW HEAVY-PARTICLE INDUCED ELECTRON EMISSION FROM SOLID SURFACES, 2007, 225 : 185 - 211
[45] Ion-induced pattern formation on Co surfaces: An x-ray scattering and kinetic Monte Carlo study
Malis, O
Brock, JD
Headrick, RL
Yi, MS
Pomeroy, JM
PHYSICAL REVIEW B, 2002, 66 (03): : 354081 - 354089
[46] Ballistic versus electronic processes in ion-induced nanostructuring of ionic surfaces
Krok, F.
Saeed, S. R.
Postawa, Z.
Szymonski, M.
PHYSICAL REVIEW B, 2009, 79 (23):
[47] ION-INDUCED SILICIDE FORMATION IN NIOBIUM THIN-FILMS
MATTESON, S
ROTH, J
NICOLET, MA
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 42 (3-4): : 217 - 226
[48] Comparison of ion-induced damage formation in (110) and (100) MgO
Wendler, E.
Gaertner, K.
Wesch, W.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (12-13): : 2872 - 2876
[49] Ion-induced roughening and ripple formation on polycrystalline metallic films
Skeren, T.
Temst, K.
Vandervorst, W.
Vantomme, A.
NEW JOURNAL OF PHYSICS, 2013, 15
[50] Swift heavy ion-induced modification and track formation in materials
Kanjilal, D.
CURRENT SCIENCE, 2001, 80 (12): : 1560 - 1566

← 1 2 3 4 5 →