Robust Hall Effect Magnetic Field Sensors for Operation at High Temperatures and in Harsh Radiation Environments

被引:20
作者
Abderrahmane, Abdelkader [1 ]
Koide, Shota [1 ]
Sato, Shin-Ichiro [2 ]
Ohshima, Takeshi [2 ]
Sandhu, Adarsh [1 ,3 ]
Okada, Hiroshi [1 ]
机构
[1] Toyohashi Univ Technol, Elect Inspired Interdisciplinary Res Inst EIIRIS, Toyohashi, Aichi 4418580, Japan
[2] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Takasaki, Gunma 3701292, Japan
[3] Tokyo Inst Technol, Dept Elect & Elect Engn, Tokyo 1528552, Japan
关键词
Compound semiconductor; Hall effect devices; ion radiation effects; robust stability; ELECTRON-MOBILITY TRANSISTORS; PROBE MICROSCOPY; ALGAN/GAN;
D O I
10.1109/TMAG.2012.2196986
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe the fabrication and magnetoelectric properties of robust, high sensitivity Hall effect sensors fabricated using AlGaN/GaN and AlInSb/InAsSb/AlInSb heterostructures with a two-dimensional electron gas at the heterointerface. The sensitivity of AlInSb/InAsSb/AlInSb heterostructure clearly degrades above similar to 150 degrees C. The AlGaN/GaN 2DEG Hall sensors were stable up to at least 400 degrees C and even after irradiation of 380 keV protons with a fluence of 1 x 10(14) cm(-2), where AlInSb/InAsSb/AlInSb heterostructure showed an increase in the sheet carrier density. The feasibility of applications of the AlGaN/GaN and AlInSb/InAsSb/AlInSb Hall sensor for harsh radiation environment is discussed.
引用
收藏
页码:4421 / 4423
页数:3
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