共 18 条
- [3] Butt JB, 2000, REACTION KINETICS RE
- [4] Initiated CVD of poly(methyl methacrylate) thin films [J]. CHEMICAL VAPOR DEPOSITION, 2005, 11 (10) : 437 - 443
- [6] Fogler H.S., 1999, ELEMENTS CHEM REACTI
- [7] Geankoplis C.J., 1993, TRANSPORT PROCESSES, V3rd
- [8] Kumar A, 1998, FUNDAMENTALS POLYM
- [9] Lewis HGP, 2001, LANGMUIR, V17, P7652, DOI 10.1021/10104929
- [10] Towards all-dry lithography: Electron-beam patternable poly(glycidyl methacrylate) thin films from hot filament chemical vapor deposition [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (05): : 2473 - 2478