Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

被引：4

作者：

Canonica, Michael D. ^{[1
]}

Zamkotsian, Frederic ^{[2
]}

Lanzoni, Patrick ^{[2
]}

Noell, Wilfried ^{[1
]}

De Rooij, Nico ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Microtechnol, CH-2002 Neuchatel, Switzerland

[2] Lab Astrophys Marseille, F-13388 Marseille 13, France

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 19期

关键词：

MOEMS DEVICES; INSTRUMENTATION; TELESCOPE;

D O I：

10.1364/OE.21.022400

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A micromirror array composed of 2048 silicon micromirrors measuring 200 x 100 mu m(2) and tilting by 25 degrees was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation at both room and cryogenic temperatures were investigated. Contrast was measured using an optical setup that mimics a MOS instrument, and mirror deformation was characterized using a Twyman-Green interferometer. The results indicate that the array exhibited a fill factor of 82%, a contrast ratio of 1000:1, and surface mirror deformations of 8 nm and 27 nm for mirrors tilted at 298 K and 162 K, respectively. (c) 2013 Optical Society of America

引用

页码：22400 / 22409

页数：10

共 14 条

[11] Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude [J].

Weber, Stefan M. ;

Bonacina, Luigi ;

Noell, Wilfried ;

Kiselev, Denis ;

Extermann, Jerome ;

Jutzi, Fabio ;

Lani, Sebastien ;

Nenadl, Ondrej ;

Wolf, Jean-Pierre ;

de Rooij, Nico F. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2011, 82 (07)

[12] Characterization of MOEMS devices for the instrumentation of next generation space telescope [J].

Zamkotsian, F ;

Gautier, J ;

Lanzoni, P .

RELIABILITY, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS II, 2003, 4980 :324-332

[13] Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation [J].

Zamkotsian, Frederic ;

Grassi, Emmanuel ;

Waldis, Severin ;

Barette, Rudy ;

Lanzoni, Patrick ;

Fabron, Christophe ;

Noell, Wilfried ;

de Rooij, Nico .

RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VII, 2008, 6884

[14] Successful evaluation for space applications of the 2048x1080 DMD [J].

Zamkotsian, Frederic ;

Lanzoni, Patrick ;

Grassi, Emmanuel ;

Barette, Rudy ;

Fabron, Christophe ;

Tangen, Kyrre ;

Valenziano, Luca ;

Marchand, Laurent ;

Duvet, Ludovic .

EMERGING DIGITAL MICROMIRROR DEVICE BASED SYSTEMS AND APPLICATIONS III, 2011, 7932

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