Application of diffractive optical elements for controlling the light beam in ptychography

被引:8
作者
Wang, Yali [1 ]
Li, Tuo [1 ]
Gao, Qiankun [1 ]
Zhang, Sanguo [1 ]
Shi, Yishi [1 ,2 ]
机构
[1] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[2] Chinese Acad Sci, Inst Informat Engn, State Key Lab Informat Secur, Beijing 100093, Peoples R China
基金
中国国家自然科学基金;
关键词
diffractive optical elements; ptychography; diffractive imaging; complex amplitude; MICROSCOPY; ILLUMINATION; ALGORITHM;
D O I
10.1117/1.OE.52.9.091720
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We designed two pieces of rotary diffractive optical elements (DOE) to control the incident light beam in ptychography. The incident light beam is shaped into the required complex amplitude as employed probes by using double DOEs. The high-quality probes are generated to illuminate on the different positions of the object, which leads to achieving superior ptychographical imaging by rotating DOEs. Consequently, mechanical movement of the specimen is avoided in the imaging process. The numerical experiments demonstrate the double-wheeling DOEs are effective for the ptychographical imaging. Further, the double discs containing several pairs of DOEs are designed for a larger field of view. As a result, the flexibility of ptychography may be improved by employing the rotary double DOEs. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
引用
收藏
页数:6
相关论文
共 50 条
  • [21] Replication technology for Diffractive Optical Elements
    Gale, MT
    DIFFRACTIVE AND HOLOGRAPHIC DEVICE TECHNOLOGIES AND APPLICATIONS IV, 1997, 3010 : 111 - 123
  • [22] Speckle-reduced diffractive optical elements beam shaping with regional padding algorithm
    Guo, Min
    Lv, Guoqiang
    Cai, Jiahao
    Wang, Zi
    Feng, Qibin
    OPTICAL ENGINEERING, 2022, 61 (12)
  • [23] Enhancement of RIE - etched Diffractive Optical Elements surfaces by using Ion Beam Etching
    Schmitt, J.
    Bischoff, Ch.
    Raedel, U.
    Grau, M.
    Wallrabe, U.
    Voelklein, F.
    OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V, 2015, 9628
  • [24] Scatterometric characterization of diffractive optical elements
    Saastamoinen, Toni
    Husu, Hannu
    Laukkanen, Janne
    Siitonen, Samuli
    Turunen, Jari
    Lassila, Antti
    INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VIII, 2014, 9173
  • [25] Diffractive optical elements written by photodeposition
    Baal-Zedaka, I
    Hava, S
    Mirchin, N
    Margolin, R
    Zagon, M
    Lapsker, I
    Azoulay, J
    Peled, A
    APPLIED SURFACE SCIENCE, 2003, 208 : 226 - 232
  • [26] Multilayer technology for diffractive optical elements
    Goebel, B
    Wang, LL
    Tschudi, T
    APPLIED OPTICS, 1996, 35 (22): : 4490 - 4493
  • [27] Replication techniques for diffractive optical elements
    Gale, MT
    MICROELECTRONIC ENGINEERING, 1997, 34 (3-4) : 321 - 339
  • [28] Rigorous synthesis of diffractive optical elements
    Noponen, E
    Saarinen, J
    DIFFRACTIVE AND HOLOGRAPHIC OPTICS TECHNOLOGY III, 1996, 2689 : 54 - 65
  • [29] Programmable multilayer diffractive optical elements
    Hamam, H
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (09): : 2223 - 2230
  • [30] Optical characterization of diffractive optical elements replicated in polymers
    Tamulevicius, S
    Janusas, G
    Guobiene, A
    Palevicius, A
    Ostasevicius, V
    Andrulevicius, M
    Metrology, Inspection, and Process Control for Microlithography XIX, Pts 1-3, 2005, 5752 : 807 - 814