共 50 条
- [21] Replication technology for Diffractive Optical Elements DIFFRACTIVE AND HOLOGRAPHIC DEVICE TECHNOLOGIES AND APPLICATIONS IV, 1997, 3010 : 111 - 123
- [23] Enhancement of RIE - etched Diffractive Optical Elements surfaces by using Ion Beam Etching OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V, 2015, 9628
- [24] Scatterometric characterization of diffractive optical elements INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VIII, 2014, 9173
- [26] Multilayer technology for diffractive optical elements APPLIED OPTICS, 1996, 35 (22): : 4490 - 4493
- [28] Rigorous synthesis of diffractive optical elements DIFFRACTIVE AND HOLOGRAPHIC OPTICS TECHNOLOGY III, 1996, 2689 : 54 - 65
- [29] Programmable multilayer diffractive optical elements JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (09): : 2223 - 2230
- [30] Optical characterization of diffractive optical elements replicated in polymers Metrology, Inspection, and Process Control for Microlithography XIX, Pts 1-3, 2005, 5752 : 807 - 814