Mid-Spatial Frequency Error (PSD-2) of optics induced during CCOS and full-aperture polishing

被引：17

作者：

Liao, D. ^{[1
]}

Yuan, Z. ^{[1
]}

Tang, C. ^{[1
]}

Xie, R. ^{[1
]}

Chen, X. ^{[1
]}

机构：

[1] Chengdu Fine Opt Engn Res Ctr, Chengdu 610041, Peoples R China

来源：

JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS | 2013年 / 8卷

关键词：

PSD2; error; pitch lap; polyurethane pad; small tool CCP; continuous polishing; REMOVAL;

D O I：

10.2971/jeos.2013.13031

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Mid-Spatial Frequency (MSF) Wavefront Error of optics divided into the PSD-1 and PSD-2 ranges plays an important role in the performance of high power laser systems. The present work focuses on the PSD-2 range in terms of short ripples which haven't been well studied in the literature. Characteristics and origins of these short ripples were detailed, whereafter small tool computer controlled polishing (CCP) and conventional full aperture polishing experiments were conducted on fused silica. It is revealed that PSD2 error is independent of the main process parameters including lap rotating rate and polishing pressure in continuous polishing and tool path pitch and crossfeed velocity in small tool CCP processes. Whereas the type of polishing lap has a decisive effect on PSD2 error of the optics. The pitch lap shows superiority in restraint of short ripples over polyurethane pad. By introducing diamond conditioner for dressing polyurethane pad, the PSD2 error has been greatly decreased. [DOI: http://dx.doi.org/10.2971/jeos.2013.13031]

引用

页码：13031.1 / 13031.5

页数：5

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