Surface band-bending assessment by photocurrent techniques. Application to III-V semiconductors

被引:10
|
作者
Izpura, I
Valtuena, JF
Munoz, E
机构
[1] Depto. de Ing. Electrónica, ETSI Telecomunicación, Univ. Politécnica de Madrid
关键词
D O I
10.1088/0268-1242/12/6/006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In epitaxial layers with a large area to thickness ratio, surface and interface space charge regions behave as transverse resistance-capacitance systems modulating the effective volume that takes part in the electrical conductivity. In this work it is shown that in photoconductivity spectroscopy experiments these surface and interface photovoltaic effects can become dominant, therefore giving information about the sample surface and interface band-bending. In photoconductivity spectroscopy, procedures to identify the signatures of such band bending are described. The present technique to assess surface bending is first applied to gated and ungated GaAs samples, to validate the present model. N-type AlGaAs and undoped InGaAs strained buffer layers, with various degrees of strain and surface roughness, are also characterized by this technique.
引用
收藏
页码:678 / 686
页数:9
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