Nanoscale Block Copolymer Ordering Induced by Visible Interferometric Micropatterning: A Route towards Large Scale Block Copolymer 2D Crystals

被引:39
作者
Aissou, Karim [1 ]
Shaver, Jonah [2 ]
Fleury, Guillaume [1 ]
Pecastaings, Gilles [1 ]
Brochon, Cyril [1 ]
Navarro, Christophe [3 ]
Grauby, Stephane [2 ]
Rampnoux, Jean-Michel [2 ]
Dilhaire, Stefan [2 ]
Hadziioannou, Georges [1 ]
机构
[1] Univ Bordeaux, Lab Chim Polymeres Organ, CNRS, LCPO,UMR 5629, F-33600 Pessac, France
[2] Univ Bordeaux, Lab Ondes & Mat Aquitaine, CNRS, LOMA,UMR 5798, F-33400 Talence, France
[3] ARKEMA, Groupement Rech Lacq, RN 117, F-64170 Lacq, France
关键词
block copolymers; surface relief grating; thin films; corrugated substrates; microstructures; micropatterning; 2D crystals; DIBLOCK COPOLYMER; THIN-FILMS; FEPT NANOPARTICLES; SYSTEM; LITHOGRAPHY; SURFACES; DOMAINS; ARRAYS;
D O I
10.1002/adma.201203254
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We have overcome the cost and time consumption limitations of common lithography techniques used to control the self-assembly of block copolymers into highly ordered 2D arrays through the use of a guiding pattern created from a polymeric sub-layer. The guiding pattern is a sinusoidal surface-relief grating interferometrically inscribed onto an azobenzene containing copolymer sub-layer leading to a defect-free single grain of block copolymer domains. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:213 / 217
页数:5
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