Suppression Technique of fast-shear-wave Spurious Responses in SAW Resonators on SiO2/Al/LiNbO3 Structure

被引：2

作者：

Fujiwara, J. ^{[1
]}

Goto, R. ^{[1
]}

Nakamura, H. ^{[1
]}

Tsurunari, T. ^{[1
]}

Nakanishi, H. ^{[1
]}

Hamaoka, Y. ^{[1
]}

机构：

[1] Panasonic Corp, Ind Devices Co, Kadoma, Osaka, Japan

来源：

2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2012年

关键词：

SiO2/Al/LiNbO3; structure; Spurious response; SAW resonator; tempature coefficient; DUPLEXER; PROPAGATION; US;

D O I：

10.1109/ULTSYM.2012.0199

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

SH mode on SiO2/Al/LiNbO3 structure is studied because of their sufficient electromechanical coupling factor (K-2) and good temperature coefficient of frequency (TCF). Authors proposed the suppression method of the spurious response of the Rayleigh mode and the transverse mode for the narrow duplex gap application. For the narrow duplex gap application, SiO2 thickness must be increased to achieve the good TCF characteristics. However, another spurious response is appeared near the fist-shear-wave as increasing the SiO2 thickness. This paper discusses the suppression mechanism of the spurious response near the fast-shear-wave.

引用

页码：799 / 802

页数：4

共 16 条

[1] Experimental and theoretical investigation for temperature characteristics and propagation losses of SAWs onSiO2/Al/LiTaO3 [J].

Asai, K ;

Hikita, M ;

Isobe, A ;

Sakiyama, K ;

Tada, T .

2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2002, :235-238

[2] Animation of calculated SAW propagation fields under periodic grating structures [J].

Hashimoto, K ;

Omori, T ;

Yamaguchi, M .

PROCEEDINGS OF THE 2000 IEEE/EIA INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & EXHIBITION, 2000, :307-310

[3] Extended FEM/SDA software for characterising surface acoustic wave propagation in multi-layered structures [J].

Hashimoto, Ken-Ya ;

Omori, Tatsuya ;

Yamaguchi, Masatsune .

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, :711-714

[4]

Hashimoto KY, 1997, 1997 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 & 2, P279, DOI 10.1109/ULTSYM.1997.663024

[5]

Kadota M, 2003, ULTRASON, P2105

[6] Small surface acoustic wave duplexer for wide-band code-division multiple access full-band system having good temperature characteristics [J].

Kadota, Michio ;

Nakao, Takeshi ;

Nishiyama, Kenji ;

Kido, Shunsuke ;

Kato, Masanori ;

Omote, Ryoichi ;

Yonekura, Hiroshi ;

Takada, Norihiko ;

Kita, Ryoichi .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (7B) :4714-4717

[7]

Miura M, 2005, ULTRASON, P573

[8] Suppression Mechanism of Transverse-Mode Spurious Responses in SAW Resonators on a SiO2/Al/LiNbO3 Structure [J].

Nakamura, H. ;

Nakanishi, H. ;

Goto, R. ;

Hashimoto, K. .

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2011, :543-546

[9] Miniature Surface Acoustic Wave Duplexer Using SiO2/Al/LiNbO3 Structure for Wide-Band Code-Division Multiple-Access System [J].

Nakamura, Hiroyuki ;

Nakanishi, Hidekazu ;

Tsurunari, Tetsuya ;

Matsunami, Ken ;

Iwasaki, Yukio ;

Hashimoto, Ken-ya ;

Yamaguchi, Masatsune .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (05) :4052-4055

[10] Suppression of Transverse-mode Spurious Responses for Zero Temperature Coefficient of Frequency SAW Resonator on a SiO2/Al/LiNbO3 Structure [J].

Nakanishi, H. ;

Nakamura, H. ;

Tsurunari, T. ;

Fujiwara, J. ;

Hamaoka, Y. ;

Hashimoto, K. .

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2011, :72-75

← 1 2 →