Cluster size dependence of sputtering yield by cluster ion beam irradiation

被引：58
作者：
Seki, T [1 ]
Murase, T
Matsuo, J
机构：
[1] Kyoto Univ, Quantum Sci & Engn Ctr, Kyoto 6110011, Japan
[2] Osaka Sci & Technol Ctr, Osaka 5500004, Japan
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2006年 / 242卷 / 1-2期
关键词：
cluster; ion beam; sputtering yield; size distribution; empirical formula;
D O I：
10.1016/j.nimb.2005.08.023
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In order to investigate the dependence of the sputtering yield on cluster size, surfaces were irradiated with cluster ion beams with various size distributions, and the sputtering yields were measured. It was found that there was a threshold energy for sputtering with cluster ion irradiation. When the cluster size was constant, the sputtering yield was proportional to acceleration energy. These results suggested an empirical formula to calculate sputtering yield from the ion energy and the size distribution of the cluster. The empirical formula indicates that the sputtering yield is proportional to the 1.1 power of the size, when the acceleration energy per atom is constant. (c) 2005 Elsevier B.V. All rights reserved.
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收藏
页码：179 / 181
页数：3
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