[1] SB RAS, Inst Semicond Phys, Lab Opt Mat & Struct, Novosibirsk 630090, Russia
[2] SB RAS, Inst Automat & Electrometry, Lab Condensed Matter Spect, Novosibirsk 630090, Russia
[3] SB RAS, Baikal Inst Nat Management, Lab Oxide Syst, Ulan Ude 670047, Russia
[4] SB RAS, Inst Semicond Phys, Lab Nanodiagnost & Nanolithog, Novosibirsk 630090, Russia
[5] Russian Acad Sci, Inst Semicond Phys, Lab Phys Principles Integrated Microelect, Novosibirsk 630090, Russia
[6] Chinese Acad Sci, Tech Inst Phys & Chem, Beijing 100190, Peoples R China
[7] Chinese Acad Sci, Univ Sci & Technol China, Key Lab Quantum Informat, Hefei 230026, Anhui, Peoples R China