Micromachined Quartz Tuning Fork Gyroscope with High Overload Capacity

To protect MEMS gyroscopes based on the quartz tuning fork in a high-g shock environment, the support bonding regions are located at where the stress concentrates in the spring beam of the tuning fork. After an analysis of the high overload shock characteristics, a highly efficient cushion structure is designed based on the ABAQUS finite element simulation. The cantilever-mass system is simplified to an equivalent mass attached to the end of the cantilever beam and the displacement response under the simple harmonic motion is simulated. A design of the position limit structure is explored and the strength distribution of the elastic quartz tuning fork is optimized. Therefore, the high shock resistance of 20,000g can be achieved and the good performance is maintained with an increase of the threshold by nearly 10 times.