Influence of Deep-Level Traps on the Breakdown Characteristics of AlGaN/GaN High Electron Mobility Transistors

被引:3
作者
Zhao, Ziqi [1 ]
Du, Jiangfeng [1 ]
Yu, Qi [1 ]
Yang, Mohua [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
关键词
AlGaN/GaN HEMTs; Deep-Level Traps; Breakdown Voltage; ON-State Resistance; CHEMICAL-VAPOR-DEPOSITION; GAN; GROWTH;
D O I
10.1166/nnl.2012.1414
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper, we investigate the influence of the deep-level traps in the GaN buffer layer on the breakdown characteristics of AlGaN/GaN high electron mobility transistors. The deep-level traps are assumed to be acceptor type with single peak distribution in energy. The leakage current through the GaN buffer layer is effectively suppressed with the presence of deep-level traps in the buffer region. Moreover, the traps charged with electrons further improve the uniformity of the electric field along the channel. The breakdown strength of the devices is dramatically enhanced by the above two factors. With trap density increasing from 1 x 10(15) cm(-3) to 5 x 10(16) cm(-3), the breakdown voltage of AlGaN/GaN HEMTs is significantly improved from 10 V to 1351 V with 5 mu m gate-drain spacing, while negligible negative impact on ON-state resistance is observed.
引用
收藏
页码:790 / 793
页数:4
相关论文
共 14 条
  • [1] Two dimensional electron gases induced by spontaneous and piezoelectric polarization in undoped and doped AlGaN/GaN heterostructures
    Ambacher, O
    Foutz, B
    Smart, J
    Shealy, JR
    Weimann, NG
    Chu, K
    Murphy, M
    Sierakowski, AJ
    Schaff, WJ
    Eastman, LF
    Dimitrov, R
    Mitchell, A
    Stutzmann, M
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 87 (01) : 334 - 344
  • [2] AlGaN/GaN/GaN:C Back-Barrier HFETs With Breakdown Voltage of Over 1 kV and Low RON x A
    Bahat-Treidel, Eldad
    Brunner, Frank
    Hilt, Oliver
    Cho, Eunjung
    Wuerfl, Joachim
    Traenkle, Guenther
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2010, 57 (11) : 3050 - 3058
  • [3] Effect of ohmic contacts on buffer leakage of GaN transistors
    Dora, Y.
    Chakraborty, A.
    Heikman, S.
    McCarthy, L.
    Keller, S.
    DenBaars, S. P.
    Mishra, U. K.
    [J]. IEEE ELECTRON DEVICE LETTERS, 2006, 27 (07) : 529 - 531
  • [4] Deep traps in AlGaN/GaN heterostructures studied by deep level transient spectroscopy: Effect of carbon concentration in GaN buffer layers
    Fang, Z-Q
    Claflin, B.
    Look, D. C.
    Green, D. S.
    Vetury, R.
    [J]. JOURNAL OF APPLIED PHYSICS, 2010, 108 (06)
  • [5] Growth of crack-free, carbon-doped GaN and AlGaN/GaN high electron mobility transistor structures on Si (111) substrates by ammonia molecular beam epitaxy
    Haffouz, S.
    Tang, H.
    Rolfe, S.
    Bardwell, J. A.
    [J]. APPLIED PHYSICS LETTERS, 2006, 88 (25)
  • [6] Growth of Fe doped semi-insulating GaN by metalorganic chemical vapor deposition
    Heikman, S
    Keller, S
    DenBaars, SP
    Mishra, UK
    [J]. APPLIED PHYSICS LETTERS, 2002, 81 (03) : 439 - 441
  • [7] Hilt O., 2011, P 23 INT S POW SEM D
  • [8] Ikeda N., 2010, P 2010 INT POW EL C
  • [9] Ikeda N., 2011, P 23 INT S POW SEM D
  • [10] GaN Power Transistors on Si Substrates for Switching Applications
    Ikeda, Nariaki
    Niiyama, Yuki
    Kambayashi, Hiroshi
    Sato, Yoshihiro
    Nomura, Takehiko
    Kato, Sadahiro
    Yoshida, Seikoh
    [J]. PROCEEDINGS OF THE IEEE, 2010, 98 (07) : 1151 - 1161