GaN-Based LEDs With Double Strain Releasing MQWs and Si Delta-Doping Layers

被引:7
作者
Chang, Chung-Ying [1 ,2 ]
Chang, Shoou-Jinn [1 ,2 ]
Liu, C. H. [3 ]
Li, Shuguang [4 ]
Lin, T. K. [5 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Adv Optoelect Technol Ctr, Res Ctr Energy Technol & Strategy, Tainan 701, Taiwan
[3] Nan Jeon Inst Technol, Dept Elect, Tainan 73746, Taiwan
[4] China Univ Petr E China, Coll Sci, Qingdao 266555, Peoples R China
[5] Epistar Corp, Tainan 744, Taiwan
关键词
GaN; light-emitting diodes (LEDs); strain release multiquantum well (MQW); Si delta-doping (Si-DD); NITRIDE-BASED LEDS; REDUCTION; POWER; BLUE;
D O I
10.1109/LPT.2012.2216517
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this letter, we report the fabrication of GaN-based light-emitting diodes (LEDs) with double strain releasing multiquantum wells and Si delta-doping (Si-DD) layers. We find that Si-DD can enhance current spreading in the in-plane direction and also suppress dislocation in the epitaxial layers. By inserting the Si-DD layers, we find that we can achieve a smaller forward voltage. We also find that we can significantly increase the reverse breakdown voltage from 35 to 125 V by introducing Si-DD layers. Furthermore, we find that the output power of the LED with Si-DD is more than 10% larger than that of the LED without Si-DD.
引用
收藏
页码:1809 / 1811
页数:3
相关论文
共 13 条
[1]   Nitride-based LEDs with textured side walls [J].
Chang, CS ;
Chang, SJ ;
Su, YK ;
Lee, CT ;
Lin, YC ;
Lai, WC ;
Shei, SC ;
Ke, JC ;
Lo, HM .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (03) :750-752
[2]   Nitride-based dual-stage MQW LEDs [J].
Chang, S. J. ;
Wei, S. C. ;
Su, Y. K. ;
Lai, W. C. .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (10) :H871-H874
[3]  
Chang S. J., 2007, APPL PHYS LETT, V91
[4]   Nitride-based LEDs with p-InGaN capping layer [J].
Chang, SJ ;
Chen, CH ;
Chang, PC ;
Su, YK ;
Chen, PC ;
Jhou, YD ;
Hung, H ;
Wang, SM ;
Huang, BR .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (12) :2567-2570
[5]   Highly reliable nitride-based LEDs with SPS plus ITO upper contacts [J].
Chang, SJ ;
Chang, CS ;
Su, YK ;
Chuang, RW ;
Lin, YC ;
Shei, SC ;
Lo, HM ;
Lin, HY ;
Ke, JC .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2003, 39 (11) :1439-1443
[6]   InGaN-GaN multiquantum-well blue and green light-emitting diodes [J].
Chang, SJ ;
Lai, WC ;
Su, YK ;
Chen, JF ;
Liu, CH ;
Liaw, UH .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) :278-283
[7]   Dislocation annihilation by silicon delta-doping in GaN epitaxy on Si [J].
Contreras, O ;
Ponce, FA ;
Christen, J ;
Dadgar, A ;
Krost, A .
APPLIED PHYSICS LETTERS, 2002, 81 (25) :4712-4714
[8]   Reduction of operation voltage in GaN-based light-emitting diode utilizing a Si δ-doped n-GaN contact layer [J].
Jeon, SR ;
Cho, MS ;
Hung, TV ;
Yu, MA ;
Yang, GM .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2002, 41 (7A) :L761-L764
[9]   Si delta doping in a GaN barrier layer of InGaN/GaN multiquantum well for an efficient ultraviolet light-emitting diode [J].
Kwon, MK ;
Park, K ;
Baek, SH ;
Kim, JY ;
Park, SJ .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (10)
[10]   Enhancing the output power of GaN-based LEDs grown on wet-etched patterned sapphire substrates [J].
Lee, Y. J. ;
Hwang, J. M. ;
Hsu, T. C. ;
Hsieh, M. H. ;
Jou, M. J. ;
Lee, B. J. ;
Lu, T. C. ;
Kuo, H. C. ;
Wang, S. C. .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2006, 18 (9-12) :1152-1154