SCANNING VERY LOW ENERGY ELECTRON MICROSCOPY

被引:0
作者
Mullerova, Ilona [1 ]
Hovorka, Milos [1 ]
Mikmekova, Sarka [1 ]
Pokorna, Zuzana [1 ]
Mikmekova, Eliska [1 ]
Frank, Ludek [1 ]
机构
[1] Inst Sci Instruments ASCR, Vvi, Brno 61264, Czech Republic
来源
NANOCON 2011 | 2011年
关键词
scanning electron microscopy; low energy electrons; grain contrast; graphene; transmitted electrons; dopant contrast; thin films;
D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Recent developments in applications of the scanning very low energy electron microscopy in selected branches of materials science are reviewed. The examples include visualization of grains in conductive polycrystals including ultrafine grained metals, identification of the local crystal orientation upon reflectance of very slow electrons, transmission mode with ultrathin free-standing films including graphene, acquisition of a quantitative dopant contrast in semiconductors, and examination of thin surface coverages.
引用
收藏
页码:238 / 244
页数:7
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