Corrected expression of the van der Waals pressure for multilayered system with application to analyses of static characteristics of flying head sliders with an ultrasmall spacing

被引:31
作者
Matsuoka, H
Ohkubo, S
Fukui, S
机构
[1] Tottori Univ, Dept Appl Math & Phys, Fac Engn, Tottori 6808552, Japan
[2] Tottori Univ, Grad Sch Engn, Master Program, Tottori 6808552, Japan
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2005年 / 11卷 / 8-10期
关键词
D O I
10.1007/s00542-005-0541-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A corrected and approximate expression of the van der Waals pressure for a multilayered system was developed. The conventional expression cannot be applied to a general multilayered system, while the corrected expression can be applied to multilayered system composed of any materials. Applying the corrected expression to the analyses of the static characteristics of an inclined flying head slider, the dependences of the static load-carrying capacity and the static limit minimum spacing on the PFPE film thickness were clarified.
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页码:824 / 829
页数:6
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