共 7 条
- [1] Technologies for cofabricating MEMS and electronics [J]. PROCEEDINGS OF THE IEEE, 2008, 96 (02) : 306 - 322
- [3] Marathe R., 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), P729, DOI 10.1109/MEMSYS.2012.6170289
- [4] Wang Y, 2011, INT CONF ACOUST SPEE, P1, DOI 10.1109/PLASMA.2011.5993071
- [5] Weinstein D., 2010, Hilton Head, P459