Transparent conductive ITO/Ag/ITO multilayer electrodes deposited by sputtering at room temperature

被引：79

作者：

Guillen, C. ^{[1
]}

Herrero, J. ^{[1
]}

机构：

[1] CIEMAT, Dep Energia, E-28040 Madrid, Spain

来源：

OPTICS COMMUNICATIONS | 2009年 / 282卷 / 04期

关键词：

FLAT-PANEL DISPLAYS; OPTICAL-PROPERTIES; LOW-RESISTANCE; THIN-FILMS; AG FILMS; ELECTRICAL-PROPERTIES; TIN OXIDE; DC; DEPENDENCE; DEVICE;

D O I：

10.1016/j.optcom.2008.10.075

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

ITO/Ag/ITO multilayers have been prepared onto conventional soda lime glass substrates by sputtering at room temperature. The optical and electrical characteristics of single layer and multilayer structures have been investigated as a function of the Ag and ITO film thicknesses. Transmittance and sheet resistance values are found mainly dependent on the Ag film thickness: whereas the wavelength range at which the maximum transmittance is achieved can be changed by adjusting the ITO films thickness. ITO/Ag/ITO electrodes with sheet resistance below 6 Omega/sq have been obtained for Ag film thickness above 10 nm and ITO layers thickness in the 30-50 nm range. These multilayers also show high transmittance in the visible spectral region, above 90% by discounting the glass substrate, with a maximum that is located at higher wavelengths for thicker ITO. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：574 / 578

页数：5

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