LTCC microfluidic system

被引：62

作者：

Golonka, LJ ^{[1
]}

Zawada, T ^{[1
]}

Radojewski, J ^{[1
]}

Roguszczak, H ^{[1
]}

Stefanow, M ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50370 Wroclaw, Poland

来源：

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY | 2006年 / 3卷 / 02期

关键词：

D O I：

10.1111/j.1744-7402.2006.02072.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A simple and inexpensive low-temperature cofired ceramic (LTCC) microfluidic device with integrated optical fibers is designed, manufactured, and tested with positive results. Fluidic channels, mixer, detector, optical fiber, light source, light detector, heater, and temperature sensor are integrated in one LTCC module. The optical system in the LTCC microsystem permits measurements of light transmittance and fluorescence. The design, technology, and results of the module's evaluation are presented.

引用

页码：150 / 156

页数：7

共 22 条

[1] BARGIEL S, 2003, P EUR 17 PORT, P669
[2] BIROT H, 2004, P 3 EUR MICR PACK S, P366
[3] CHUDY M, 2003, P 7 INT C MIN CHEM B, P171
[4] COLON RC, 2004, P IMAPS C CER INT TE, P139
[5] LTCC based microfluidic system with optical detection
Golonka, LJ
Roguszczak, H
Zawada, T
Radojewski, J
Grabowska, I
Chudy, M
Dybko, A
Brzozka, Z
Stadnik, D
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2005, 111 : 396 - 402
[6] Golonka LJ, 2002, INFORM MIDEM, V32, P272
[7] GOLONKA LJ, 2003, P S PROC EL BLED SLO, P313
[8] The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor
Gongora-Rubio, M
Solá-Laguna, LM
Moffett, PJ
Santiago-Avilés, JJ
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1999, 73 (03) : 215 - 221
[9] Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)
Gongora-Rubio, MR
Espinoza-Vallejos, P
Sola-Laguna, L
Santiago-Avilés, JJ
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2001, 89 (03) : 222 - 241
[10] GONGORARUBIO MR, 2003, P EUR 17, P823

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