Determining measurement uncertainty in nanometrology with the example of nanoclusters

被引：2

作者：

Weckenmann, A ^{[1
]}

Wiedenhöfer, T

Sommer, KD

机构：

[1] Univ Erlangen Nurnberg, Lehrstuhl Qual Management, D-8520 Erlangen, Germany

[2] Univ Erlangen Nurnberg, Lehrstuhl Fertigungsmesstech, D-8520 Erlangen, Germany

[3] Lehrstuhl Qual Management & Fertigungsmesstech, D-91052 Erlangen, Germany

来源：

TECHNISCHES MESSEN | 2004年 / 71卷 / 02期

关键词：

measurement uncertainty; nanometrology; nanocluster; GUM;

D O I：

10.1524/teme.71.2.93.27065

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

To assign an uncertainty to measurement results in nanotechnology is a new metrological challenge. It is to be recognized that still there is a lack of models and procedures on how to analyze and interpret the tasks and influences. Additionally, the basic mechanisms currently known are insufficiently researched. A possible approach to overcome these problems (deficiencies) is presented with the particular task of measuring Nanoclusters. After gathering and describing the knowledge about the measurement task and relevant parameters, the measurement is mathematically to be modelled and the parameters are to be evaluated by means of probability distributions. Then, based on the GUM procedure, the complete measurement result consisting of an expectation and an associated uncertainty can be calculated. Finally, the uncertainty budget obtained is to be analyzed.

引用

页码：93 / 100

页数：8