Preparation and characterization of transparent conducting tin oxide thin film electrodes by chemical vapour deposition from reactive thermal evaporation of SnCl2

被引：38

作者：

Yadava, YP ^{[1
]}

Denicolo, G ^{[1
]}

Arias, AC ^{[1
]}

Roman, LS ^{[1
]}

Hummelgen, IA ^{[1
]}

机构：

[1] UNIV FED PARANA, DEPT FIS, MAT LAB, PR-81531990 CURITIBA, PARANA, BRAZIL

来源：

MATERIALS CHEMISTRY AND PHYSICS | 1997年 / 48卷 / 03期

关键词：

tin oxide; thin films chemical vapour deposition; structure; optical transmittance; electrical properties; surface morphology;

D O I：

10.1016/S0254-0584(96)01899-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A chemical vapour deposition technique has been developed for highly transparent conducting tin oxide thin films from the reactive thermal evaporation of SnCl2. We have demonstrated that good quality tin oxide thin films for electrode application in electronic devices can be produced by such a technologically simple and inexpensive way. Best results concerning optical transmittance, electrical conductivity and crystallinity (SnO2) were obtained in this way at substrate temperatures in the range of 500-550 degrees C.

引用

页码：263 / 267

页数：5

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