Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method

被引：1
|
作者：
Sun, Binwei [1 ]
Pan, Dong [1 ]
Huang, Zehua [1 ]
Wang, Jun [1 ]
Jiang, Yadong [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Optoelect Informat, State Key Lab Elect Thin Films & Integrated Devic, 4,Sect 2,North Jianshe Rd, Chengdu 610054, Peoples R China
来源：
8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTOELECTRONIC MATERIALS AND DEVICES | 2016年 / 9686卷
关键词：
Lithium tantalate; Sol-gel process; Thermal analysis; X-ray diffraction; Raman spectra; Dielectric properties;
D O I：
10.1117/12.2242862
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Multilayer lithium tantalate thin films have been successfully prepared on Pt/Ti/SiO2/Si(100) substrate using sol-gel and spin-coating method. Polycrystalline perovskite films were obtained through pyrolysis at 400 degrees C and subsequent calcination at various temperatures from 500 degrees C to 700 degrees C for 1h, which were optimized by means of X-ray diffraction, Raman spectroscopy and thermal analysis. The morphology on the top surface and fractured cross section of LT films was observed by a field-emission scanning electron microscope. The 300 nm thick LT film annealed at 650 degrees C exhibited a dielectric constant of 19.8 and a loss tangent of 0.06 at 10KHz.
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页数：6
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