Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method

被引：1
|
作者：
Sun, Binwei [1 ]
Pan, Dong [1 ]
Huang, Zehua [1 ]
Wang, Jun [1 ]
Jiang, Yadong [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Optoelect Informat, State Key Lab Elect Thin Films & Integrated Devic, 4,Sect 2,North Jianshe Rd, Chengdu 610054, Peoples R China
来源：
8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTOELECTRONIC MATERIALS AND DEVICES | 2016年 / 9686卷
关键词：
Lithium tantalate; Sol-gel process; Thermal analysis; X-ray diffraction; Raman spectra; Dielectric properties;
D O I：
10.1117/12.2242862
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Multilayer lithium tantalate thin films have been successfully prepared on Pt/Ti/SiO2/Si(100) substrate using sol-gel and spin-coating method. Polycrystalline perovskite films were obtained through pyrolysis at 400 degrees C and subsequent calcination at various temperatures from 500 degrees C to 700 degrees C for 1h, which were optimized by means of X-ray diffraction, Raman spectroscopy and thermal analysis. The morphology on the top surface and fractured cross section of LT films was observed by a field-emission scanning electron microscope. The 300 nm thick LT film annealed at 650 degrees C exhibited a dielectric constant of 19.8 and a loss tangent of 0.06 at 10KHz.
引用
收藏
页数：6
相关论文
共 50 条
  • [1] Structural, dielectric and ferroelectric properties of multilayer lithium tantalate thin films prepared by sol-gel technique
    Satapathy, S.
    Verma, Prabha
    Gupta, P. K.
    Mukherjee, Chandrachur
    Sathe, V. G.
    Varma, K. B. R.
    THIN SOLID FILMS, 2011, 519 (06) : 1803 - 1808
  • [2] Synthesis and characterization of nanostructured strontium hexaferrite thin films by the sol-gel method
    Masoudpanah, S. M.
    Ebrahimi, S. A. Seyyed
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2012, 324 (14) : 2239 - 2244
  • [3] Characterization of LiTaO3 thin films fabricated by sol-gel technique
    Youssef, S.
    Al Asmar, R.
    Podlecki, J.
    Delannoy, F. Pascal
    Zaatar, Y.
    Foucaran, A.
    MICROELECTRONICS JOURNAL, 2007, 38 (01) : 63 - 66
  • [4] Synthesis and characterization of LiCoO2 thin films prepared by the sol-gel method
    Patil, Vaishali
    Patil, Arun
    Choi, Ji-Won
    Yoon, Seok-Jin
    SOLID STATE SCIENCES, 2011, 13 (06) : 1232 - 1234
  • [5] Synthesis and characterization of sol-gel derived magnesium tantalate nanopowder
    Jiang, Yi-Shan
    Luo, Jiang-Hua
    Li, Zhen
    Chen, Lu-Ning
    EMERGING FOCUS ON ADVANCED MATERIALS, PTS 1 AND 2, 2011, 306-307 : 1162 - 1165
  • [6] Characterization of BaTiO3 thin films fabricated by sol gel method
    Cruz, DH
    Lessard, RA
    APPLICATIONS OF PHOTONIC TECHNOLOGY 5: CLOSING THE GAP BETWEEN THEORY, DEVELOPMENT, AND APPLICATION, 2002, 4833 : 548 - 554
  • [7] Sol-Gel Synthesis of a Zn-Doped Lithium Tantalate Growth Charge
    Masloboeva, S. M.
    Palatnikov, M. N.
    Arutyunyan, L. G.
    INORGANIC MATERIALS, 2020, 56 (03) : 270 - 276
  • [8] Bimetallic colloids of silver and copper in thin films: sol-gel synthesis and characterization
    Suyal, G
    THIN SOLID FILMS, 2003, 426 (1-2) : 53 - 61
  • [9] Synthesis and characterization of zinc aluminum oxide thin films by sol-gel technique
    Phani, AR
    Passacantando, M
    Santucci, S
    MATERIALS CHEMISTRY AND PHYSICS, 2001, 68 (1-3) : 66 - 71
  • [10] Characterization of ZrTiO4 thin films prepared by sol-gel method
    Hsu, Cheng-Hsing
    Lin, Shih-Yao
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2013, 16 (05) : 1262 - 1266
12345