An In-situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency

被引：0
|
作者：
Chen, Han [1 ]
Rong, Hua [2 ]
机构：
[1] PLA Univ Sci & Technol, Dept Comp Sci ICA, Nanjing 210007, Jiangsu, Peoples R China
[2] Nanjing Normal Univ, Sch Phys Sci & Technol, Nanjing 210097, Jiangsu, Peoples R China
来源：
MICRO-NANO TECHNOLOGY XIII | 2012年 / 503卷
关键词：
Young's modulus; Center-anchored circular plate; Resonance frequency;
D O I：
10.4028/www.scientific.net/KEM.503.308
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Large-scale measurement of material property is not suit for the MEMS thin-film. Research the in-situ measuring method for material property of the MEMS thin-film is urgently. A center-anchored circular plate is adopted as the test structure here. The resonance frequency of the circular plate is measured to extract the Young's modulus of a MEMS thin-film. The accuracy of this non-contact in-situ measuring method has been verified by CoventorWare. The inferences of the stress gradient have been analyzed. The advantages of the test structure and the measuring method present here also have been discussed.
引用
收藏
页码：308 / +
页数：2
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