The effects of transmission through a magnetic filter on the ion charge state distribution of a cathodic vacuum arc plasma

被引：15

作者：

Bilek, MMM ^{[1
]}

Brown, IG ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1999年 / 27卷 / 01期

关键词：

filtered cathodic vacuum arc; ion charge states; 90 degrees filter; time of flight spectroscopy;

D O I：

10.1109/27.763115

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

In this paper we report the effects of transmission through a 90 degrees solenoidal magnetic filter on the ion charge state distribution of a vacuum are plasma as a function of the magnetic field strength and the injection distance between the cathode and filter entrance. The mean ion charge state, measured using the time of flight technique, increased compared with the unfiltered value at low magnetic fields and then steadily decreased as the filter field was increased. At high fields, it was significantly lower than the unfiltered value.

引用

页码：193 / 198

页数：6

共 17 条

[1]

AKSENOV II, 1978, SOV J PLASMA PHYS, V4, P425

[2] Vacuum arc plasma jet propagation in a toroidal duct [J].

Alterkop, B ;

Gidalevich, E ;

Goldsmith, S ;

Boxman, RL .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (09) :6791-6802

[3] TRANSPORT OF VACUUM-ARC PLASMAS THROUGH MAGNETIC MACROPARTICLE FILTERS [J].

ANDERS, A ;

ANDERS, S ;

BROWN, IG .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1995, 4 (01) :1-12

[4] FOCUSED INJECTION OF VACUUM-ARC PLASMAS INTO CURVED MAGNETIC FILTERS [J].

ANDERS, S ;

ANDERS, A ;

BROWN, I .

JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) :4895-4899

[5]

[Anonymous], 1966, SOV PHYS DOKL

[6] Deposition probe technique for the determination of film thickness uniformity [J].

Bilek, MMM ;

Brown, IG .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (09) :3353-3356

[7] A study of filter transport mechanisms in filtered cathodic vacuum arcs [J].

Bilek, MMM ;

Yin, YB ;

McKenzie, DR .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1996, 24 (03) :1165-1173

[8] MODELING PLASMA-FLOW IN STRAIGHT AND CURVED SOLENOIDS [J].

BOERCKER, DB ;

SANDERS, DM ;

STORER, J ;

FALABELLA, S .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (01) :115-120

[9] VACUUM-ARC ION CHARGE-STATE DISTRIBUTIONS [J].

BROWN, IG ;

GODECHOT, X .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (05) :713-717

[10] IMPROVED TIME-OF-FLIGHT ION CHARGE STATE DIAGNOSTIC [J].

BROWN, IG ;

GALVIN, JE ;

MACGILL, RA ;

WRIGHT, RT .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (09) :1589-1592

← 1 2 →