Size effect on the electron wind force for electromigration at the top metal-dielectric interface in nanoscale interconnects

被引：6
|
作者：
Wu, Zhuo-Jie [1 ]
Ho, Paul S. [1 ]
机构：
[1] Univ Texas Austin, Microelect Res Ctr, Austin, TX 78758 USA
来源：
APPLIED PHYSICS LETTERS | 2012年 / 101卷 / 10期
关键词：
RESISTIVITY; FILMS; MODEL;
D O I：
10.1063/1.4750067
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report a classical model on the size effect of the electron wind force on a metal atom at the metal-dielectric interface in nanoscale interconnects. The effect is expressed as a size factor S for the effective charge Z*e. It is found that the size factor decreases with scaling due to reduced electron drift momentum as a result of scattering at interfaces and grain boundaries. The electron wind force on the metal atoms at the top metal-dielectric interface is enhanced by the interface scattering. This force enhancement is partially mitigated by the grain boundary scattering. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4750067]
引用
收藏
页数：5
相关论文
共 20 条
  • [1] METAL-DIELECTRIC INTERFACE SUPERCONDUCTIVITY AND SUPERCONDUCTING SIZE EFFECT
    TSUEI, CC
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1974, 19 (03): : 348 - 348
  • [2] SIZE EFFECT IN METAL-DIELECTRIC COMPOSITES
    GALECZKI, G
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1993, 160 (1-2) : 68 - 72
  • [3] Electron Transfer in Nanoscale Contact Electrification: Effect of Temperature in the Metal-Dielectric Case
    Lin, Shiquan
    Xu, Liang
    Xu, Cheng
    Chen, Xiangyu
    Wang, Aurelia C.
    Zhang, Binbin
    Lin, Pei
    Yang, Ya
    Zhao, Huabo
    Wang, Zhong Lin
    ADVANCED MATERIALS, 2019, 31 (17)
  • [4] Terminal interface effect in metal-dielectric multilayer
    Hu, Jigang
    Ren, Tao
    Wang, Guanjun
    Gao, Weiqing
    Chen, Junxue
    Gao, Feng
    Ming, Hai
    2013 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: MICRO/NANO PHOTONICS AND FABRICATION, 2013, 9047
  • [5] Ultrafast Electron-Phonon Coupling at Metal-Dielectric Interface
    Yao, Qiaomu
    Guo, Liang
    Iyer, Vasudevan
    Xu, Xianfan
    HEAT TRANSFER ENGINEERING, 2019, 40 (13-14) : 1211 - 1219
  • [6] Medium Electric Field Electron Injection/Extraction at Metal-Dielectric Interface
    Neagu, E. R.
    Dias, C. J.
    Lanca, M. C.
    Igreja, R.
    Marat-Mendes, J. N.
    ADVANCED MATERIALS FORUM V, PT 1 AND 2, 2010, 636-637 : 437 - +
  • [7] Measurement and dynamics of the spatial distribution of an electron localized at a metal-dielectric interface
    Bezel, I
    Gaffney, KJ
    Garrett-Roe, S
    Liu, SH
    Miller, AD
    Szymanski, P
    Harris, CB
    JOURNAL OF CHEMICAL PHYSICS, 2004, 120 (02): : 845 - 856
  • [8] The radiation-induced galvanic effect at a metal-dielectric interface
    Zaitsev, V. I.
    Barykov, I. A.
    Kartashov, A. V.
    Terent'ev, O. V.
    Rodionov, N. B.
    TECHNICAL PHYSICS LETTERS, 2016, 42 (11) : 1134 - 1136
  • [9] Near dispersion-less surface plasmon polariton resonances at a metal-dielectric interface with patterned dielectric on top
    Kasture, Sachin
    Mandal, P.
    Singh, Amandev
    Ramsay, Andrew
    Vengurlekar, A. S.
    Gupta, S. Dutta
    Belotelov, Vladimir
    Gopal, Achanta Venu
    APPLIED PHYSICS LETTERS, 2012, 101 (09)
  • [10] Effect of the interface on femtosecond laser damage of a metal-dielectric low dispersion mirror
    Zhang, Yuhui
    Wang, Yanzhi
    Chen, Ruiyi
    Wang, Zhihao
    Zhao, Jiaoling
    Li, Dawei
    Zhu, Meiping
    Zhao, Yuanan
    Jin, Yunxia
    Yi, Kul
    Leng, Yuxin
    Li, Ruxin
    He, Hongbo
    Shao, Jianda
    OPTICS EXPRESS, 2021, 29 (06) : 8171 - 8180
12