Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses

被引：4

作者：

Higashiguchi, Takeshi ^{[1
,2
]}

Dojyo, Naoto ^{[1
,2
]}

Hamada, Masaya ^{[1
,2
]}

Kawasaki, Kelta ^{[1
,2
]}

Sasaki, Wataru ^{[3
]}

Kubodera, Shoichi ^{[1
,2
]}

机构：

[1] Miyazaki Univ, Dept Elect & Elect Engn, Gakuen Kibanadai Nishi 1-1, Miyazaki 8892192, Japan

[2] Miyazaki Univ, Photon Sci Ctr, Miyazaki 8892192, Japan

[3] NTP Inc, Miyazaki 8892192, Japan

来源：

EMERGING LITHOGRAPHIC TECHNOLOGIES X, PTS 1 AND 2 | 2006年 / 6151卷

关键词：

laser produced plasma (LPP); extreme ultraviolet (EUV) emission; liquid jet targets;

D O I：

10.1117/12.659162

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrated a debris-free, efficient laser-produced plasma extreme ultraviolet (EUV) source by use of a regenerative liquid microjet target containing tin-dioxide (SnO2) nano-particles. By using a low SnO2 concentration (6%) solution and dual laser pulses for the plasma control, we observed the EUV conversion efficiency of 1.2% with undetectable debris.

引用

页码：U1571 / U1578

页数：8

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