Mechanisms of carbon deposition -: a kinetic approach

被引:95
作者
Hu, ZJ [1 ]
Hüttinger, KJ [1 ]
机构
[1] Univ Karlsruhe, Inst Chem Tech, D-76128 Karlsruhe, Germany
关键词
pyrolytic carbon; chemical vapor deposition; modeling;
D O I
10.1016/S0008-6223(01)00316-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Decisive processes of carbon deposition were discussed. The geometry of the apparatus was shown to be defined by the ratio of the substrate surface area and the free reactor volume. In a growth mechanism, active sites were required for the chemisorption of reactive species from the gas phase. The nucleation mechanism was limited to large polycyclic aromatic hydrocarbons and thus controlled by the formation rate of such species in the gas phase.
引用
收藏
页码:624 / 628
页数:5
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