Substrate Transfer Technology for Stretchable Electronics

被引:9
作者
Joshi, S. [1 ,2 ]
Savov, A. [1 ]
Dekker, R. [1 ,2 ]
机构
[1] Delft Univ Technol, NL-2628 CD Delft, Netherlands
[2] Philips Res, NL-5656 AE Eindhoven, Netherlands
来源
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016 | 2016年 / 168卷
关键词
substrate transfer; flexible; stretchable; body patches; ultrasound;
D O I
10.1016/j.proeng.2016.11.459
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper focuses on the implementation of a new technique for the fabrication of stretchable electronic patches that can be used for medical applications. The technique is based on the Electronics on Plastics by Laser Release (EPlaR) technology which enables a one-step release of a stack of flexible/stretchable layers incorporating the active layers like interconnects and embedded devices. As a proof of concept meander shaped polyimide (PI) structures are fabricated on top of a glass substrate and then transferred to a PDMS substrate with the use of this technology. The stretchability in the device is enhanced by fabricating these meander shaped structures free from the PDMS substrate hence giving them the freedom to move out of plane. (C) 2016 The Authors. Published by Elsevier Ltd.
引用
收藏
页码:1555 / 1558
页数:4
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