Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution

被引：19

作者：

Chien, Miao-Hsuan ^{[1
]}

Steurer, Johannes ^{[1
]}

Sadeghi, Pedram ^{[1
]}

Cazier, Nicolas ^{[1
]}

Schmid, Silvan ^{[1
]}

机构：

[1] TU Wien, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria

来源：

ACS PHOTONICS | 2020年 / 7卷 / 08期

基金：

欧洲研究理事会;

关键词：

in-plane displacement sensor; position-sensitive detector; nanoelectromechanical resonators; photothermal effect; ATOMIC-FORCE MICROSCOPY; SINGLE;

D O I：

10.1021/acsphotonics.0c00701

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/root Hz for a low laser power of 85 mu W and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.

引用

页码：2197 / 2203

页数：7

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