Novel H-beam electrothermal actuators with capability of generating bi-directional static displacement

A new H-beam electrothermal microactuator is proposed for providing bi-directional static displacement. The design concept and preliminary experimental results of H-beam actuators are presented in this paper. Due to its symmetric structural design, this H-beam actuator can avoid the influence from rotational torques during its bi-directional dynamic and static movement. The restoring force generated by cold beam of H-beam actuator potentially renders this new actuator capability of faster returning speed than conventional electrothermal actuator designs. H-beam actuator is able to generate 50 mu m static stroke under 0.9 W electrical dc load. This H-beam electrothermal actuator is well functioned and exhibits good characteristics with high-level performance for industrial applications.