Fabrication of micro-pin array with high aspect ratio on stainless steel using nanosecond laser beam machining

被引：31

作者：

Lee, Se Won ^{[2
]}

Shin, Hong Shik ^{[1
]}

Chu, Chong Nam ^{[2
]}

机构：

[1] Korea Natl Univ Transportat, Dept Energy Syst Engn, Chungju 380702, Chungbuk, South Korea

[2] Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151744, South Korea

来源：

APPLIED SURFACE SCIENCE | 2013年 / 264卷

基金：

新加坡国家研究基金会;

关键词：

Micro-pin array; High aspect ratio; Laser beam machining; Recast layer; Attaching force; Surface roughness; DIE;

D O I：

10.1016/j.apsusc.2012.10.087

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this paper, a micro-pin array with a high aspect ratio was fabricated on AISI 304 using laser beam ablation for attachment to a vertical wall. In recent times, there has been research in various fields, including robotics and bio-MEMS, regarding attachment to vertical walls, and micro-pin arrays may offer the best solution. For vertical wall attachment, the micro-pin should have a high aspect ratio, long length, and sharp tip. The recast layer could be piled due to the chromium oxide with high surface tension and viscosity of chromium oxide, and it composed the micro-pins with high aspect ratio. Xray photoelectron spectroscopy (XPS) was used to identify the characteristics of the piled recast layer. The machining characteristics for a high aspect ratio micro-pin array were investigated according to laser beam machining parameters. In addition, experiments for attaching force relative to the surface roughness of the subject plane were carried out. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：653 / 663

页数：11

共 20 条

[11] A periodic array of silicon pillars fabricated by photoelectrochemical etching [J].

Li, Xiaopeng ;

Seo, Hong-Seok ;

Um, Han-Don ;

Jee, Sang-Won ;

Cho, YongWoo ;

Yoo, Bongyoung ;

Lee, Jung-Ho .

ELECTROCHIMICA ACTA, 2009, 54 (27) :6978-6982

[12] Hydrodynamic chromatography of polystyrene microparticles in micropillar array columns [J].

Op de Beeck, Jeff ;

De Malsche, Wim ;

Vangelooven, Joris ;

Gardeniers, Han ;

Desmet, Gert .

JOURNAL OF CHROMATOGRAPHY A, 2010, 1217 (39) :6077-6084

[13] Replication of high aspect ratio pillar array structures in biocompatible polymers for tissue engineering applications [J].

Padeste, C. ;

Ozcelik, H. ;

Ziegler, J. ;

Schleunitz, A. ;

Bednarzik, M. ;

Yucel, D. ;

Hasirci, V. .

MICROELECTRONIC ENGINEERING, 2011, 88 (08) :1836-1839

[14] Study of melt flow dynamics and influence on quality for CO2 laser fusion cutting [J].

Riveiro, A. ;

Quintero, F. ;

Lusquinos, F. ;

Comesana, R. ;

Pou, J. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (13)

[15] Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis [J].

Sainiemi, Lauri ;

Keskinen, Helmi ;

Aromaa, Mikko ;

Luosujarvi, Laura ;

Grigoras, Kestas ;

Kotiaho, Tapio ;

Makela, Jyrki M. ;

Franssila, Sami .

NANOTECHNOLOGY, 2007, 18 (50)

[16] Spectral and surface analysis of heated micro-column arrays fabricated by laser-assisted surface modification [J].

Starikov, D ;

Boney, C ;

Pillai, R ;

Bensaoula, A ;

Shafeev, GA ;

Simakin, AV .

INFRARED PHYSICS & TECHNOLOGY, 2004, 45 (03) :159-167

[17]

Steen WM, 2010, LASER MATERIAL PROCESSING, 4TH EDITION, P1, DOI 10.1007/978-1-84996-062-5

[18] Quality factors assessed by analytical modelling in laser cutting [J].

Tani, G ;

Tomesani, L ;

Campana, G ;

Fortunato, A .

THIN SOLID FILMS, 2004, 453 :486-491

[19]

Thrun S., 2005, ROBOTICS SCI SYSTEMS, VMassachusetts, P2005

[20] Dross formation during laser cutting process [J].

Yilbas, BS ;

Aleem, BJA .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2006, 39 (07) :1451-1461

← 1 2 →