Measurement of glass surface contamination

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) was employed to examine two types of glass surface contamination which are 'sucker marks' and 'paper stains'. We successfully identified and differentiated different kinds of rubber sucker marks. The TOF-SIMS images of inorganic and organic contaminants on the paper stain surfaces es were also measured. From this study, it is clear that the small hazy spot defects observed in the thin ITO films on the glass surfaces result from sucker marks caused by silicone-, nitrile-, or fluorine-contained-rubber. The paper stains are composed of two regions of sodium staining and organic contaminant adhesion. (C) 1997 Elsevier Science B.V.