Accuracy of electrostatic lens computations with FOFEM

被引:4
作者
Lencová, B [1 ]
机构
[1] Acad Sci Czech Republ, Inst Sci Instruments, CS-61264 Brno, Czech Republic
关键词
finite element method; electrostatic lenses; accuracy of computation;
D O I
10.1016/S0304-3991(02)00283-8
中图分类号
TH742 [显微镜];
学科分类号
摘要
The increased speed of personal computers enables fast computation of rotationally symmetric electrostatic lenses with the first-order finite element method in meshes with a large number of mesh points. In order to produce an estimate of accuracy of the computed potential, we propose a simple procedure based on doubling the number of mesh points in each coordinate. In this way, we can produce for the lower-density mesh at each point the information about error of the potential and visualize the sources of the computation errors. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:263 / 270
页数:8
相关论文
共 11 条
[1]  
CHMELIK J, 1993, P SOC PHOTO-OPT INS, V2014, P133, DOI 10.1117/12.155693
[2]   Comparison of FDM, FEM and BEM for electrostatic charged particle optics [J].
Cubric, D ;
Lencova, B ;
Read, FH ;
Zlamal, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 427 (1-2) :357-362
[3]  
Hawkes P., 1996, Principles of Electron Optics
[4]  
Khursheed A., 1999, FINITE ELEMENT METHO
[5]   Analytical and numerical computation of multipole components of magnetic deflectors [J].
Lenc, M ;
Lencova, B .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (12) :4409-4414
[6]   Accurate computation of magnetic lenses with FOFEM [J].
Lencová, B .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 427 (1-2) :329-337
[7]  
LENCOVA B, 1997, HDB CHARGED PARTICLE
[8]  
LENCOVA B, 1986, SCANNING ELECT MIC 3, V86, P897
[9]  
Munro E, 1997, HDB CHARGED PARTICLE
[10]   Field function evaluation techniques for electron lenses and deflectors [J].
Zhu, XQ ;
Liu, HN ;
Rouse, J ;
Munro, E .
CHARGED-PARTICLE OPTICS II, 1996, 2858 :68-80