Integrated optical gyroscopes offering low cost, small size and vibration immunity

被引:31
作者
Monovoukas, C [1 ]
Swiecki, AK [1 ]
Maseeh, F [1 ]
机构
[1] IntelliSense Corp, Wilmington, MA 01887 USA
来源
INTEGRATED OPTICS DEVICES IV | 2000年 / 3936卷
关键词
gyros; optical gyros; integrated optics; MEMS;
D O I
10.1117/12.379961
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
IntelliSense has developed an integrated optic gyro technology that provides the sensitivity of fiber optic gyros while utilizing batch microfabrication techniques to achieve the low cost of mechanical MEMS gyros. The base technology consists of an optical resonating waveguide chip, sensor electronics and an optical bench. The sensing element is based on an integrated optic waveguide (IOW) chip in which counter-propagating optical fields are used to sense rotation in the plane of the waveguide through the Sagnac effect. It is powered by a semiconductor laser light source, which is coupled into a waveguide and split into two waveguide arms. Both signals are probed through the out coupled light at each waveguide arm, and rate information is derived from the difference in phase between these two signals. Measuring angular rotation is important for proper operation of a variety of systems such as: missile guidance systems, satellites, energy exploration, camera stabilization, robotics positioning, platform stabilization and space craft guidance to mention a few. This technology overcomes the limitations that previous commercially available gyros for this purpose have had including limitations in size, accuracy, sensitivity, durability, and premium price.
引用
收藏
页码:293 / 300
页数:8
相关论文
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OPTICS LETTERS, 1981, 6 (08) :401-403
[2]  
MASEEH F, 1997, SPIES 1997 S MICR MI
[3]  
MASEEH F, 1998, SEMI COMM MICR 98 SA