Enhanced thermal conduction by surface phonon-polaritons

被引:69
作者
Wu, Y. [1 ]
Ordonez-Miranda, J. [2 ]
Gluchko, S. [1 ,4 ]
Anufriev, R. [1 ]
Meneses, D. De Sousa [3 ]
Del Campo, L. [3 ]
Volz, S. [1 ,4 ]
Nomura, M. [1 ]
机构
[1] Univ Tokyo, Inst Ind Sci, Tokyo 1538505, Japan
[2] Univ Poitiers, Inst Pprime, CNRS, ISAE ENSMA, F-86962 Chasseneuil, France
[3] Univ Orleans, CNRS, UPR3079, CEMHTI, F-45071 Orleans, France
[4] Univ Tokyo, Lab Integrated Micromechatron Syst, Natl Ctr Sci Res, Inst Ind Sci LIMMS CNRS IIS, Tokyo 1538505, Japan
关键词
RADIATIVE HEAT-TRANSFER; STRESS;
D O I
10.1126/sciadv.abb4461
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Improving heat dissipation in increasingly miniature microelectronic devices is a serious challenge, as the thermal conduction in nanostructures is markedly reduced by increasingly frequent scattering of phonons on the surface. However, the surface could become an additional heat dissipation channel if phonons couple with photons forming hybrid surface quasiparticles called surface phonon-polaritons (SPhPs). Here, we experimentally demonstrate the formation of SPhPs on the surface of SiN nanomembranes and subsequent enhancement of heat conduction. Our measurements show that the in-plane thermal conductivity of membranes thinner than 50 nm doubles up as the temperature rises from 300 to 800 kelvin, while thicker membranes show a monotonic decrease. Our theoretical analysis shows that these thickness and temperature dependencies are fingerprints of SPhP contribution to heat conduction. The demonstrated thermal transport by SPhPs can be useful as a previously unidentified channel of heat dissipation in a variety of fields including microelectronics and silicon photonics.
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页数:5
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共 34 条
[1]   THERMAL-CONDUCTIVITY OF DISORDERED HARMONIC SOLIDS [J].
ALLEN, PB ;
FELDMAN, JL .
PHYSICAL REVIEW B, 1993, 48 (17) :12581-12588
[2]   Quasi-Ballistic Heat Conduction due to Levy Phonon Flights in Silicon Nanowires [J].
Anufriev, Roman ;
Gluchko, Sergei ;
Volz, Sebastian ;
Nomura, Masahiro .
ACS NANO, 2018, 12 (12) :11928-11935
[3]   Mapping Heat Origin in Plasmonic Structures [J].
Baffou, Guillaume ;
Girard, Christian ;
Quidant, Romain .
PHYSICAL REVIEW LETTERS, 2010, 104 (13)
[4]   High-performance bulk thermoelectrics with all-scale hierarchical architectures [J].
Biswas, Kanishka ;
He, Jiaqing ;
Blum, Ivan D. ;
Wu, Chun-I ;
Hogan, Timothy P. ;
Seidman, David N. ;
Dravid, Vinayak P. ;
Kanatzidis, Mercouri G. .
NATURE, 2012, 489 (7416) :414-418
[5]   Nanoscale thermal transport [J].
Cahill, DG ;
Ford, WK ;
Goodson, KE ;
Mahan, GD ;
Majumdar, A ;
Maris, HJ ;
Merlin, R ;
Phillpot, SR .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (02) :793-818
[6]   Infrared dielectric properties of low-stress silicon nitride [J].
Cataldo, Giuseppe ;
Beall, James A. ;
Cho, Hsiao-Mei ;
McAndrew, Brendan ;
Niemack, Michael D. ;
Wollack, Edward J. .
OPTICS LETTERS, 2012, 37 (20) :4200-4202
[7]   HEAT FLOW IN THIN FILMS VIA SURFACE PHONON-POLARITONS [J].
Chen, Dye-Zone A. ;
Chen, Gang .
FRONTIERS IN HEAT AND MASS TRANSFER, 2010, 1 (02)
[8]   Measurement of silicon dioxide surface phonon-polariton propagation length by attenuated total reflection [J].
Chen, Dye-Zone A. ;
Chen, Gang .
APPLIED PHYSICS LETTERS, 2007, 91 (12)
[9]   Surface phonon-polariton mediated thermal conductivity enhancement of amorphous thin films [J].
Chen, DZA ;
Narayanaswamy, A ;
Chen, G .
PHYSICAL REVIEW B, 2005, 72 (15)
[10]   Near-field radiative transfer in spectrally tunable double-layer phonon-polaritonic metamaterials [J].
Didari, Azadeh ;
Elcioglu, Elif Begum ;
Okutucu-Ozyurt, Tuba ;
Menguc, M. Pinar .
JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 2018, 212 :120-127